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  • 图形化u赢电竞iosWPSS

    2014-09-02

    2"WPSS

    Inspection

    Item

    Detail

    Spec

    Description

    SEM
    Image
    Inspection

    Width

    Average

    5.40±0.40um





    Unif.

    5%

    Height

    Average

    1.65±0.1um

    Unif.

    5%

    OM Image
    Inspection

    C-plane

    Average

    0.55±0.25um

    Unif.

    5%

    Scope Inspection

    Pattern Link

    Pattern Link

    8ea

    every pattern link should be counted

    Pattern Missing

    100um

    8ea

    pattern missing in a Circle area diameter:100umshould be judged as 1ea

    Scratch

    1.2mm

    7ea

    width60um and lenth1.2mm should be judged as 1ea
    if the pattern link happenes in the nearest 20 patternes area from the scratch,the pattern link should not be counted

    Edge Bead

    Edge Bead

    1.8mm

    The pattern failed within the 1.8mm area from the wafer edge should not be counted
    The non-pattern area should be less than1mm from the wafer edge

    Abnormal Shape

    Abnormal Shape

    3%

    Total area of abormal shape pattern should be less than 3%


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