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  • 图形化u赢电竞iosDPSS

    2014-09-02

    2"DPSS

    Inspection

    Item

    Detail

    Spec

    Description

    SEM
    Image
    Inspection

    Width

    Average

    2.70±0.15um

    Flat-top shaped pattern not allowed

    Unif.

    5%

    Height

    Average

    1.65±0.15um

    Unif.

    5%

    Scope Inspection

    Particle

    50um*

    100ea

    No visible particle on wafer
    The total lens should be less than 3mm

    [50um250um]*

    30ea

    [250um,500um]*

    20ea

    [500um,1500um]*

    10ea

    1500um*

    0

    Pattern Missing

    50um*

    80ea

    The total length shoud be less than 2mm

    [50um250um]*

    30ea

    [250um,500um]*

    15ea

    [500um,1500um]*

    8ea

    1500um*

    0

    Pattern Fail

    50um*

    80ea

    [50um250um]*

    30ea

    [250um,500um]*

    15ea

    [500um,1500um]*

    8ea

    1500um*

    0

    Scratch

    1.2mm

    7ea

    width60um and lenth1.2mm should be judged as 1ea
    if the pattern link happenes in the nearest 20 patternes area from the scratch,the pattern link should not be counted

    Edge Bead

    Edge Bead

    1.8mm

    The pattern failed within the 1.8mm area from the wafer edge should not be counted
    The non-pattern area should be less than1mm from the wafer edge

    Abnormal Shape

    Abnormal Shape

    3%

    Total area of abormal shape pattern should be less than 3%

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